| 摘要 |
An electrostatic chuck (110) includes an angled conduit (160), or an angled laser drilled passage, through which a heat transfer gas is provided. A segment of the angled conduit (160) and/or the angled laser drilled passage extends along an axis different from an axis (147) of the electric field generated to hold a substrate (130) to the chuck, thereby minimizing plasma arcing and backside gas ionization. A first plug may be inserted into the conduit, wherein a segment of a first exterior channel thereof extends along an axis different from an axis of the electric field. A first and second plug may be inserted into a ceramic sleeve which extends through at least one of the dielectric member (117) and the electrode (115). Finally, the surface of the dielectric member may comprise embossments (600) arranged at radial distances from the center of the dielectric member so as to improve heat transfer and gas distribution.
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