Method and assembly for depth-resolved optical detection of an illuminated sample

摘要

The arrangement has a scanner (9) scanning a sample (29) or a part of a sample. A line forming optics (7) is provided for linear beam formation of illuminating lights. The lights exhibit a periodic structure in a direction in space, a mask (13) for producing the structure is provided in an illumination beam path. Light coming out from the sample is detected, and images of the sample are produced. An optical cross-section image through the sample and/or an image with increased resolution is estimated from the images. The mask is subordinate to the scanner in an illumination direction. An independent claim is also included for a method for optically detecting a sample.