发明名称 Magnetic tunnel junction temperature sensors and methods
摘要 Techniques of sensing a temperature of a heat source disposed in a substrate of an integrated circuit are provided. According to one exemplary method, a Magnetic Tunnel Junction ("MTJ") temperature sensor is provided over the heat source. The MTJ temperature sensor comprises an MTJ core configured to output a current during operation thereof. The value of the current varies based on a resistance value of the particular MTJ core. The resistance value of the MTJ core varies as a function of the temperature of the heat source. A value of the current of the MTJ core can then be associated with a corresponding temperature of the heat source.
申请公布号 US7510883(B2) 申请公布日期 2009.03.31
申请号 US20050239884 申请日期 2005.09.30
申请人 EVERSPIN TECHNOLOGIES, INC. 发明人 CHUNG YOUNG SIR;BAIRD ROBERT W.;DURLAM MARK A.
分类号 H01L21/00;H01L27/14 主分类号 H01L21/00
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