发明名称 Method of forming mirrors by surface transformation of empty spaces in solid state materials
摘要 A multi-layered reflective mirror formed of spaced-apart plate-shaped empty space patterns formed within a substrate is disclosed. The plurality of plate-shaped empty space patterns are formed by drilling holes in the substrate and annealing the substrate to form the spaced-apart plate-shaped empty space patterns.
申请公布号 US7512170(B2) 申请公布日期 2009.03.31
申请号 US20060476918 申请日期 2006.06.29
申请人 MICRON TECHNOLOGY, INC. 发明人 GEUSIC JOSEPH E.;MARSH EUGENE P.
分类号 H01S3/08;G02B1/10;H01L21/00 主分类号 H01S3/08
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