| 摘要 |
Antireflective coating compositions with reduced outgassing are disclosed, comprising (a) a polymer comprising one or more functional groups capable of one or more interactions selected from the group consisting of covalent bonding, ionic bonding, and hydrogen bonding; and (b) a thermal acid generator which upon heating disassociates into constituent parts that are capable of one or more interactions selected from the group consisting of covalent bonding, ionic bonding, and hydrogen bonding.
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