发明名称 NON-POLAR III-V NITRIDE MATERIAL AND PRODUCTION METHOD
摘要 A method for growing flat, low defect density, and strain-free thick non-polar III-V nitride materials and devices on any suitable foreign substrates using a fabricated nano-pores and nano-network compliant layer with an HVPE, MOCVD, and integrated HVPE/MOCVD growth process in a manner that minimum growth will occur in the nano-pores is provided. The method produces nano-networks made of the non-polar III-V nitride material and the substrate used to grow it where the network is continuous along the surface of the template, and where the nano-pores can be of any shape.
申请公布号 US2009079035(A1) 申请公布日期 2009.03.26
申请号 US20070861747 申请日期 2007.09.26
申请人 WANG WANG NANG 发明人 WANG WANG NANG
分类号 H01L29/20;H01L21/36 主分类号 H01L29/20
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