| 摘要 |
PROBLEM TO BE SOLVED: To improve the high-frequency sensitivity of a vibration transducer. SOLUTION: The vibration transducer comprises: a substrate on which an opening of a back cavity is formed; a conductive diaphragm constituted of a deposition film and including a central portion corresponding to the opening and the surroundings of the opening on the substrate and a plurality of arms radially extending outwardly from the central portion; a conductive plate constituted of a deposition film opposite to the diaphragm; and a support means which fixes distal ends of the arms and an outer edge of the plate on the substrate while insulating them and forms voids between the substrate and the diaphragm and between the diaphragm and the plate, respectively. Wherein, the edge of the central portion forms a straight line between adjacent the arms. COPYRIGHT: (C)2009,JPO&INPIT
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