STORAGE AND CARRYING SYSTEM WITH STORAGE

摘要

PROBLEM TO BE SOLVED: To enable arrangement in a small space along a track, facilitate maintenance work and efficiently store/retrieve loads or efficiently carry the loads inside a storage by a simple configuration, in the storage such as a stocker for temporarily storing loads such as FOUPs for storing various types of substrates for semiconductor device manufacturing in a position adjacent to the track. SOLUTION: The storage 10 in which storing/retrieving of loads are performed between the storage 10 and a carrying truck 2 for carrying the loads on the track 1 is provided with a drive means capable of reciprocating the loads in one horizontal direction and of reciprocating the loads in the vertical direction; and with a shelf having shelf portions on which the loads moved by the drive means can be stored/placed at a plurality of stages in the vertical direction so that more than one of the shelf portions are disposed in one horizontal direction at each of the stages. The shelf is arranged with respect to the track 1 so that the one horizontal direction of the shelf is orthogonal to the direction of the track 1. COPYRIGHT: (C)2009,JPO&INPIT