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发明名称
摘要
申请公布号	JP4245158(B2)	申请公布日期	2009.03.25
申请号	JP20040122651	申请日期	2004.04.19
申请人		发明人
分类号	H01L21/8246;H01L27/105;H01L29/786	主分类号	H01L21/8246
代理机构		代理人
主权项
地址

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