摘要 |
A plasma reactor including a plasma generating electrode which includes a plurality of unit electrodes hierarchically layered at specific intervals, a casing in which the plasma generating electrode is disposed, and a power supply which applies a voltage to the unit electrodes, generating plasma in a space formed between the unit electrodes by applying a pulse voltage between the unit electrodes from the power supply, and capable of processing exhaust gas introduced into the space through reaction, the plasma reactor further including a light-transmitting section formed in the casing for externally detecting light emitted by the plasma, light detection means capable of detecting light emitted by the plasma through the light-transmitting section, and control means for controlling electric energy applied to the unit electrodes depending on intensity of light detected by the light detection means.
|