发明名称 Plasma reactor
摘要 A plasma reactor including a plasma generating electrode which includes a plurality of unit electrodes hierarchically layered at specific intervals, a casing in which the plasma generating electrode is disposed, and a power supply which applies a voltage to the unit electrodes, generating plasma in a space formed between the unit electrodes by applying a pulse voltage between the unit electrodes from the power supply, and capable of processing exhaust gas introduced into the space through reaction, the plasma reactor further including a light-transmitting section formed in the casing for externally detecting light emitted by the plasma, light detection means capable of detecting light emitted by the plasma through the light-transmitting section, and control means for controlling electric energy applied to the unit electrodes depending on intensity of light detected by the light detection means.
申请公布号 US7508140(B2) 申请公布日期 2009.03.24
申请号 US20070704201 申请日期 2007.02.09
申请人 NGK INSULATORS, LTD. 发明人 KONDO ATSUO
分类号 H01J7/24;H05B11/00;H05B31/26 主分类号 H01J7/24
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