发明名称 |
METHOD FOR SUPPLYING CHEMICAL |
摘要 |
A method for supplying chemical is provided to supply mixed solution continuously in changing a mixing tank by monitoring the density of a mixed solution. A first mixed solution is manufactured by supplying at least more than two kind of solution to a first mixing tank(S100). The concentration of the first mixed solution is checked by using the densitometer connected to a mixed solution supply tube(S110). The first mixed solution is supplied to a liquid agent processing equipment(S120). The second mixed solution is manufactured by supplying at least more than two kinds of the solution to a second mixing tank(S130). The concentration of the second mixed solution stored in the second blending tank is checked by a certain cycle by utilizing the densitometer(S150).
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申请公布号 |
KR20090030051(A) |
申请公布日期 |
2009.03.24 |
申请号 |
KR20070095359 |
申请日期 |
2007.09.19 |
申请人 |
SEMES CO., LTD. |
发明人 |
KWON, JU KYUNG;JUNG, PYEONG SOON |
分类号 |
H01L21/304 |
主分类号 |
H01L21/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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