发明名称 METHOD FOR SUPPLYING CHEMICAL
摘要 A method for supplying chemical is provided to supply mixed solution continuously in changing a mixing tank by monitoring the density of a mixed solution. A first mixed solution is manufactured by supplying at least more than two kind of solution to a first mixing tank(S100). The concentration of the first mixed solution is checked by using the densitometer connected to a mixed solution supply tube(S110). The first mixed solution is supplied to a liquid agent processing equipment(S120). The second mixed solution is manufactured by supplying at least more than two kinds of the solution to a second mixing tank(S130). The concentration of the second mixed solution stored in the second blending tank is checked by a certain cycle by utilizing the densitometer(S150).
申请公布号 KR20090030051(A) 申请公布日期 2009.03.24
申请号 KR20070095359 申请日期 2007.09.19
申请人 SEMES CO., LTD. 发明人 KWON, JU KYUNG;JUNG, PYEONG SOON
分类号 H01L21/304 主分类号 H01L21/304
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