| 摘要 |
A chemical treatment apparatus is provided to efficiently secure the discharge path of the drug solution about the external frame by preventing the interference between an external frame and a liquid agent processing unit. A chemical treatment apparatus(100) comprises a bottom part(200), a plate(300), a drug solution exhausting part(400), and a driving part(500). The bottom part has the opening(210). The plate is arranged on the bottom part in order to cover the opening. The drug solution exhausting part is arranged on the plate. The drug solution exhausting part has a delivery tube(410) and an exhaust line(430). The delivery tube is arranged between the process processing unit and the plate. The drug solution is delivered to the delivery tube from the process processing unit. The exhaust line is arranged between the delivery tube and external frame. The delivery tube and the exhaust line are connected through the plate. The drug solution is delivered from the delivery tube to the external frame.
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