摘要 |
A system device package that includes a semiconductor substrate, a metal line formed on the semiconductor substrate, a passivation film formed over the semiconductor substrate including the metal line, wherein the passivation film includes first and second openings, a pad formed over the passivation film and covering the first and second openings for connection to the metal line through the first opening, a via conductor extending through the pad, the passivation film and the semiconductor substrate such that the via conductor is in direct contact with the pad. The via conductor includes a first exposed end protruding from the pad and which serves as a first bump and a second exposed end protruding from the substrate that serves as a second bump. As a result, it is possible to reduce the total number of processes and fabrication costs and thus to improve fabrication efficiency. |