| 摘要 |
A cleaning device is provided to improve the effectiveness of the cleaning work by cleanly removing the inside adherence material. The washing solution is stored in a lavation tank(600). The washing solution is circulated by a circulating pump(500). The flow direction of the washing solution is converted by the direction changing part(400) into the forward direction or the reverse direction. A mixing vaporizer(100) comprises a housing(140), a plurality of holes, the Piezo valve(110) and a diaphragm(120). The material liquid is flowed in through the first hole(215) of the mixing vaporizer. The carrier gas is flowed in through the second hole(225) of the mixing vaporizer. The material liquid and the carrier gas are mixed in a mixed space(130) of the mixing vaporizer and produce the mixing gas.
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