METHOD FOR DEPOSITING A FLUORINATED LAYER FROM A PRECURSOR MONOMER
摘要
The invention relates to a method for depositing a fluorinated layer onto a substrate, said method comprising the injection of a gaseous mixture containing a fluorinated compound and a carrier gas into a zone for the discharge or post-discharge of an atmospheric cold plasma at a pressure of between 0.8 and 1.2 bar. The invention is characterised in that the fluorinated compound has a boiling temperature higher than 25°C at a pressure of 1 bar.
申请公布号
WO2009030763(A2)
申请公布日期
2009.03.12
申请号
WO2008EP61814
申请日期
2008.09.05
申请人
UNIVERSITE LIBRE DE BRUXELLES;RENIERS, FRANCOIS;VANDENCASTEELE, NICOLAS;BURY, OLIVIER