发明名称 |
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a semiconductor device containing quantum dots having different properties over a plurality of regions. <P>SOLUTION: The method comprises depositing a semiconductor layer over a semiconductor surface 1 having at least one first region 2 with a first (average surface lattice) parameter value and at least one second region 3 having a second parameter value different from the first parameter value. The semiconductor layer is deposited to a thickness to form self-organized islands 6 and 7. A capping layer 8 is deposited over the islands 6 and 7 and has a greater forbidden bandgap than the islands whereby the islands form quantum dots, which have different properties over the first and second regions due to difference(s) between the first and second region islands. <P>COPYRIGHT: (C)2009,JPO&INPIT |
申请公布号 |
JP2009055016(A) |
申请公布日期 |
2009.03.12 |
申请号 |
JP20080193464 |
申请日期 |
2008.07.28 |
申请人 |
SHARP CORP |
发明人 |
SMEETON TIM MICHAEL;SMITH KATHERINE LOUISE;SENES MATHIEU XAVIER;HOOPER STEWART EDWARD |
分类号 |
H01L21/203;H01L27/10;H01L33/06;H01S5/343 |
主分类号 |
H01L21/203 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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