| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquefied gas supply device and supply method, having good operability and compact-constitution, preventing liquefaction of low-steam pressure liquefied gas in an air supply pipe, and stably supplying a required flow rate. SOLUTION: In this liquefied gas supply device, air is supplied by piping from a filling container 1a and liquefied gas is supplied to a process device 5 isolated therefrom. In the device, the temperature To of liquefied gas in liquid phase in the filling container 1a is controlled to be lower than the lowest temperature of environmental temperature Ta of a primary piping equipment, the liquefying temperature Tc in a re-liquefying means 3a or a storage temperature Ts of a storage means 3b is controlled to be lower than the liquefied gas temperature To of liquid phase in the filling container 1a, and the liquefying gas temperature Tg in a liquid phase in a secondary vaporizing means 3c is controlled to be lower than the lowest temperature of environmental temperature Tb of a secondary piping equipment 4. COPYRIGHT: (C)2009,JPO&INPIT
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