| 摘要 |
PROBLEM TO BE SOLVED: To provide an element evaluation method, constituted so as to evaluate the element shape of the lead element of a magnetic head, which enables the evaluation of lead width, core width and element height by the same evaluation sample, and an element evaluation apparatus. SOLUTION: An electron beam enters a first region where a first part comprising a first material overlies a second part comprising a second material to measure the intensity of the first electron beam showing the contrast depending on the atomic masses of the constituent elements of the first and second materials while an electron beam enters a second region comprising the first material to measure the intensity of the second electron beam showing the contrast depending on the atomic mass of the constituent element of the first material and an electron beam enters a third region comprising the second material to measure the intensity of the third electron beam showing the contrast depending on the atomic mass of the constituent element of the second material. The relationship between the intensity of the first electron beam and the thickness of the first part is calculated from the relationship between the intensity of the second electron beam and the thickness of an evaluated sample and the relationship between the intensity of the third electron beam and the thickness of the evaluated sample to calculate the thickness of the first part of the first region. COPYRIGHT: (C)2009,JPO&INPIT
|
