| 摘要 |
<p>According to one aspect of the invention, a dicing device comprises imaging means for imaging the edge and its periphery of a blade at which the blade is brought into contact with a work along X-direction. The imaging means images the edge and its periphery of the blade before worked to measure the position of the edge by image processing. With this, the dicing device acquires outside diameter size information on the blade before worked. Similarly, the imaging means images the edge of the blade after worked to measure the position of the edge of the blade after worked. In such a way, the amount of wear of the blade is calculated from the difference between the measured values before and after the blade is worked, and the lowering distance of the blade is adjusted according to the calculated value.</p> |
