| 摘要 |
A target with an arc guiding film is provided to extend the valid life time of target by accurately informing a user of the exchange requirement point of time. A target with an arc guiding film(10) comprises a target part(11); and an arc guiding film(12) equipped on the rear surface of the target part and consisting of the mixing of the insulating property material particle and metallic base material. The mixing ratio of the insulating property material particle and metallic base material is 95:5 through 50:50 to the volume ratio. The metallic base material is selected from group including copper, aluminum, tin, indium, iron, nickel and stainless steel. The insulating property material particle is selected from group including ceramics, rubber and synthetic resin.
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