CHEMICAL SUPPLY APPARATUS AND METHOD FOR CORRECTING OF CHEMICAL CONCENTRATION THEREOF

摘要

A chemical supply apparatus and a method for correcting chemical concentration are provided to manage an amount of chemical materials to be supplied and the concentration in real time and prevent the waster of a processing time and the chemical materials by using a sensor. At least one chemical tank(102) mixes a plurality of chemical materials. A plurality of valves(108) is installed in the chemical supply line to supply the chemical material to the chemical tank. A sensor(110) measures the volume of the mixed solution of the chemical tank. A densitometer(130) measures the concentration of the mixed solution of the chemical tank in real time. A controller(120) corrects the concentration of the mixed solution by controlling the valves.