| 摘要 |
An arc guiding board is provided to improve the target utilization ratio as a major original material by extending the valid life time of target. An arc guiding board(30) comprises a metallic base material(31) and insulating property material particle(32). The metallic base material and insulating property material particle are mixed to the volume ratio to 95:5 though 50:50. The metallic base material has copper, aluminum, tin, indium, iron, nickel and stainless steel. The insulating property material particle has ceramics, rubber and synthetic resin. The arc guiding board is inserted and built between a backing plate on a sputtering device and target and generating arc in case of the target burn-in.
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