APPARATUS AND METHOD FOR MEASURING SHAPE

摘要

A shape measuring apparatus and method are provided to improve the measurement precision by using a plurality of laser devices outputting interference signal for detecting the wavelength of the generated beam. A shape measuring apparatus comprises a plurality of laser devices(111,116) which generate beams, emit the specific frequency beam among the generated beams, and output interference signal for detecting the wavelength of the generated beam; and a controller(120) which detects the wavelength of the generated beam from the outputted interference signal and controls the laser devices based on the detected wavelength.