APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR SENSING SUBSTRATE WITH THE APPARATUS

摘要

A substrate processing apparatus and a substrate sensing method are provided to sense all region of a substrate processing surface through an optical signal by rotating the substrate. A support member(120) supports a substrate. A driving unit rotates the supporting member. A light emitting sensor(162) emits an optical signal in order to cross the processed side of the substrate. A light receiving sensor(164) receives the optical signal which the light emitting sensor emits. A control member determines whether the substrate is positioned in a right position of the support member.