发明名称 METHOD FOR ETCHING LAYERS DEPOSITED ON TRANSPARENT SUBSTRATES SUCH AS A GLASS SUBSTRATE, TRANSPARENT SUBSTRATE ETCHED BY THE METHOD, DISPLAY SCREEN INCORPORATING THE SUBSTRATE AND ETCHING DEVICE
摘要 A process for electrochemically etching a layer with electric conduction properties, of the doped metal oxide type, on a transparent substrate of the glass type, fitted with a mask capable of being removed after etching. The process brings at least one region to be etched of the layer into contact with an electrically conducting solution, immerses an electrode in the solution and places the electrode facing and at a distance from the region, and applies an electrical voltage between the electrode and the layer to be etched. The electrode has an oblong shape such that the etching is carried out on several regions of the layer over a width of the substrate.
申请公布号 KR100888244(B1) 申请公布日期 2009.03.11
申请号 KR20037011490 申请日期 2003.09.01
申请人 发明人
分类号 H01L21/3063;(IPC1-7):H01L21/306 主分类号 H01L21/3063
代理机构 代理人
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