发明名称 Method for manufacturing plasma display panels with consistent panel substrate characteristics
摘要 A method for manufacturing plasma display panels (PDP) is disclosed. The method appropriately controls conditions in an evaporating room during the process of forming film on a substrate of the PDP, thereby obtaining quality film. The method includes a deposition step where film is formed on front substrate (3) held by substrate holder (30), which is repeatedly used in the deposition step. Substrate holder (30) attached with the film due to repeated use co-exist in evaporating room (21) with another substrate holder (30), from which the film attached is removed, so that the conditions such as a degree of vacuum changes only a little.
申请公布号 US7500894(B2) 申请公布日期 2009.03.10
申请号 US20040516080 申请日期 2004.11.29
申请人 PANASONIC CORPORATION 发明人 SHINOZAKI JUN;TAKASE MICHIHIKO;FURUKAWA HIROYUKI
分类号 H01J9/00;C23C14/08;C23C14/56;H01J9/20;H01J11/10;H01L21/687 主分类号 H01J9/00
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