SHIELD BODY AND VACUUM PROCESSING APPARATUS,申请号KR20077008329-传众专利搜索

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发明名称	SHIELD BODY AND VACUUM PROCESSING APPARATUS
摘要
申请公布号	KR100887440(B1)	申请公布日期	2009.03.10
申请号	KR20077008329	申请日期	2007.04.12
申请人		发明人
分类号	H01L21/304;H01L21/02	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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