发明名称 Ozone concentration sensor
摘要 An apparatus and method provide measurement of a constituent of a fluid, such as ozone in ozonated water. The apparatus includes a vessel to contain the fluid, a light source configured to direct a first band of light and a second band of light along a substantially shared path though the fluid, and a photosensor that senses the first band of light and the second band of light. The constituent has a greater absorption associated with the first band of light than with the second band of light. The method includes modification of a measured attribute of the component in response to the sensed second band of light to improve the accuracy of the measured attribute.
申请公布号 US7502114(B2) 申请公布日期 2009.03.10
申请号 US20040799331 申请日期 2004.03.12
申请人 MKS INSTRUMENTS, INC. 发明人 LEVINE STEPHAN;SEIWERT JOHANNES;LOHR JOACHIM;BRAMMER ULRICH;FITTKAU JENS
分类号 G01N21/00;G01N21/31 主分类号 G01N21/00
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