发明名称 DEVICE AND METHOD FOR PRODUCTION OF SEMICONDUCTOR GRADE SILICON
摘要 <p>This invention relates to a device and method for production of ingots of semiconductor grade silicon, including solar grade silicon, where the presence of oxygen in the hot zone is substantially reduced or eliminated by employing materials void of oxides in the hot zone of the melting and crystallisation process. The method may be employed for any known process including for crystallising semiconductor grade silicon ingots, including solar grade silicon ingots, such as the Bridgman process, the block-casting process, and the CZ-process for growth of monoicrystalline silicon crystals. The invention also relates to devices for carrying out the melting and crystallisation processes, where the materials of the hot zone are void of oxides.</p>
申请公布号 KR20090024802(A) 申请公布日期 2009.03.09
申请号 KR20097001211 申请日期 2009.01.20
申请人 REC SCANWAFER AS 发明人 JULSRUD STEIN;NAAS TYKE LAURENCE
分类号 C30B15/20;C04B35/565;C04B35/584;H01L31/042 主分类号 C30B15/20
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