发明名称 Method and apparatus for colloidal particle cleaning
摘要 Methods and apparatuses for cleaning a surface is provided. In one embodiment, a method includes the step of determining the type and size of the contaminant particles. A solution, which may include a plurality of variable size particles, may be selected such that an appropriate size cleaning particle is used during the cleaning process. The solution may include polystyrene latex particles or other cleaning particles. Alternatively, the solution may be a slurry. The solution and particles are delivered to the surface via a nozzle at a velocity that does not damage the surface and that clears the contaminants from the surface.
申请公布号 US7497913(B2) 申请公布日期 2009.03.03
申请号 US20060414146 申请日期 2006.04.28
申请人 SEMATECH INC. 发明人 RASTEGAR ABBAS;EICHENLAUB SEAN
分类号 B08B7/00;B08B3/00;B08B3/04;B08B7/04 主分类号 B08B7/00
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