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发明名称
具有改良均匀度之微机电系统及其制造方法
摘要
本发明揭示一种微机电系统(MEMS)装置及其制造方法。在一态样中,诸如干涉调变器之MEMS包括支撑一可变形反射层的一或多个细长内部柱及支撑轨条,其中该等细长内部柱完全在一干涉空腔内且平行于该等支撑轨条而对齐。在另一态样中,该干涉调变器包括一或多个细长蚀刻释放孔,其形成于该可变形反射层中且平行于形成于该可变形反射层中的界定该可变形反射层之平行条带之通道而对齐。
申请公布号
TW200909341
申请公布日期
2009.03.01
申请号
TW097124918
申请日期
2008.07.02
申请人
高通微机电系统科技公司
发明人
大卫L 席尔德;章凡恩;菲利 丹 佛洛依
分类号
B81C1/00(2006.01);B81B3/00(2006.01)
主分类号
B81C1/00(2006.01)
代理机构
代理人
陈长文
主权项
地址
美国
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