PLASMA-RESISTANT CERAMICS WITH CONTROLLED ELECTRICAL RESISTIVITY

摘要

PLASMA-RESISTANT CERAMICS WITH CONTROLLED ELECTRICAL RESISTIVITY Specialty ceramic materials which resist corrosion/erosion under semiconductor processing conditions which employ a corrosive/erosive plasma. The corrosive plasma may be a halogen-containing plasma. The specialty ceramic materials have been modified to provide a controlled electrical resistivity which suppresses plasma arcing potential.