| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a liquid crystal display including a thin film transistor having highly reliable electric characteristics with high mass productivity. <P>SOLUTION: In a liquid crystal display having reverse stagger type thin film transistor, the reverse stagger type thin film transistor has a gate insulating film formed on a gate electrode, a microcrystal semiconductor film formed on the gate insulating film as a channel forming region, a buffer layer formed on the microcrystal semiconductor film, a pair of a source region and a drain region are formed on the buffer layer, and a pair of a source electrode and a drain electrode formed on the buffer layer and touching the source region and the drain region so as to expose the regions partially. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
