| 摘要 |
PROBLEM TO BE SOLVED: To securely inspect a projection portion or recessed portion formed in a trench. SOLUTION: In the inspecting method for inspecting internal shapes of trenches formed in a semiconductor substrate, carbon nanotubes are grown in the trenches and upper end surfaces of the grown carbon nanotubes are observed. On the upper end surfaces of the grown carbon nanotubes, internal shapes of trenches of the trenches are reproduced, so the upper end surfaces 122 of the grown carbon nanotubes are observed to detect a projection portion or recessed portion present in a trench. COPYRIGHT: (C)2009,JPO&INPIT
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