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发明名称
CHARGED PARTICLE BEAM INSPECTION APPARATUS AND METHOD FOR FABRICATING DEVICE USING THAT INSPECTION APPARATUS
摘要
申请公布号
KR100885940(B1)
申请公布日期
2009.02.26
申请号
KR20027014575
申请日期
2001.06.27
申请人
发明人
分类号
H01J37/29;G01N23/225;H01J37/06;H01J37/073;H01J37/18;H01J37/20;H01J37/22;H01J37/244;H01J37/28;(IPC1-7):H01J37/29
主分类号
H01J37/29
代理机构
代理人
主权项
地址
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