| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide the frequency adjustment method of a piezoelectric device, which does not bring about disconnections during frequency adjustment, even when employing a piezoelectric vibrating piece having a lead out electrode in a step part. <P>SOLUTION: In the frequency adjustment method, an excitation electrode of the piezoelectric vibrating piece which has the step part between a vibration part having the excitation electrode formed thereon and a peripheral edge having an input/output electrode formed thereon and has the lead out electrode which electrically connects the excitation electrode and the input/output electrode formed across the step part and has thickness shear vibration as main vibration, is etched after the piezoelectric vibrating piece is mounted on a package base. At least a portion of the excitation electrode placed more on the side of an energy confinement area which is formed elliptically in the vibration part, from a tangent defined for a portion closest to a portion to which the lead out electrode is connected, in the peripheral edge of the excitation electrode, out of a curve along the external shape of the energy confinement area is etched as an etching area. <P>COPYRIGHT: (C)2009,JPO&INPIT |
