发明名称 POSITIONING DEVICE, EXPOSURE DEVICE, AND METHOD FOR MANUFACTURING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a positioning device capable of safely stopping a moving body regardless of the drive status of the moving body. <P>SOLUTION: The device for positioning the moving body 4 includes: a drive part 2 for driving the moving body 4; a power supply 3 for supplying the electric power to the drive part 2; and a control part 1. The control part 1 shuts off the power supply from the power supply 3 to the drive part 2 after an elapse of time decided depending on the drive status of the moving part 4 by the drive part 2 in response to a stop instruction signal for instructing the drive stop of the moving part 4. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009043852(A) 申请公布日期 2009.02.26
申请号 JP20070205848 申请日期 2007.08.07
申请人 CANON INC 发明人 KOBAYASHI FUMITAKE
分类号 H01L21/027 主分类号 H01L21/027
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