| 摘要 |
PROBLEM TO BE SOLVED: To provide a hydrogen gas sensor having a speedy response time, capable of detecting even a small amount of hydrogen gas having a low concentration. SOLUTION: In this hydrogen gas sensor 1, a cavity 4 is formed corresponding to a membrane 3 on the surface of a silicon substrate 2, and a thermopile is provided on the membrane 3, and a hot contact part of the thermopile is arranged to be positioned corresponding to the upside of the cavity 4 and the membrane 3, and a cold contact part thereof is arranged to be positioned corresponding to the outside of the cavity 4 and the membrane 3, and a blackened platinum catalyst layer 10 is formed to cover the hot contact part. COPYRIGHT: (C)2009,JPO&INPIT
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