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发明名称
Polymer, Resistzusammensetzung und Musterübertragungsverfahren
摘要
申请公布号
DE60137280(D1)
申请公布日期
2009.02.26
申请号
DE2001637280
申请日期
2001.03.05
申请人
SHIN-ETSU CHEMICAL CO. LTD.
发明人
NISHI, TSUNEHIRO;HASEGAWA, KOJI;WATANABE, TAKERU;KINSHO, TAKESHI;HATAKEYAMA, JUN
分类号
G03F7/004;G03F7/039;C08F232/08
主分类号
G03F7/004
代理机构
代理人
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地址
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