A POWDER TRAP FOR VACUUM PIPE OF SEMICONDUCTOR ELEMENT PROCESSING

摘要

A powder trap for a vacuum pipe of a semiconductor element processing is provided to prevent the sampled powder from flowing reversely by conveniently separating only the powder collecting part. An assembly(21) is a cylindrical form and is opened in lower-part. The assembly is assembled at the bottom part of a vacuum pipe(100). A powder coherence unit(20) includes the cooling unit and is mounted on the bottom part of the vacuum pipe. The powder trap unit is the cylindrical form in which the upper side is opened. The hollow is formed along the side wall of the powder coherence unit. A cooling water inflow opening(32) is formed to be connected to the hollow and supplies the cooling water within the hollow. A cooling water outlet(33) ejects the cooling water within the hollow.