| 摘要 |
PROBLEM TO BE SOLVED: To perform high-accuracy measurement by preventing undesirable stress from being put on an optical wave guide. SOLUTION: A gas detection part 2 includes an optical wave-guide layer formed on a substrate 10, a detection material 12 provided on the wave-guide layer to react with a detected gas, a prism 13 for guiding laser light to the wave-guide layer, and a prism 14 for guiding guided light from the wave-guide layer. The detection part 2 is housed/disposed in a chamber 3 which comprises an inlet 16 and an outlet 17 for the detected gas while including a light window 18 with laser light from a laser diode 5 passing therethrough and a light window 19 with the guided light from the detection part 2 passing therethrough. This dispenses with the need for providing a cell on the wave-guide layer for thereinto introducing the detected gas as in hitherto-known examples, preventing undesirable stress from being put on the wave-guide layer. COPYRIGHT: (C)2009,JPO&INPIT |
