| 摘要 |
PROBLEM TO BE SOLVED: To prevent a holding groove of a substrate holder from cracking even when a substrate moves against the substrate holder due to shaking, etc. of the substrate holder for holding the substrate, in a substrate treating device. SOLUTION: The device includes: the substrate holder containing at least three supporting columns supported by a top plate and a bottom plate and at least holding grooves 106 capable of horizontalizing the substrate provided to the supporting columns, respectively; and a reaction tube for treating the substrate while holding with the substrate supporter. In the supporting columns, the side for inserting/removing the substrate from a center part of a groove bottom of the holding groove of the two supporting columns located in the side for inserting/removing from the holding groove of the substrate are formed into a convex curve shape. COPYRIGHT: (C)2009,JPO&INPIT |
