| 摘要 |
PROBLEM TO BE SOLVED: To provide a small-sized acceleration sensor of high detection sensitivity. SOLUTION: This acceleration sensor 1 is a vibratory body 10 having a base part 20 fixed on a base and a beam-shaped vibration arm 21 extended out of the base part 20 and bendingly vibrating in a planar direction at a prescribed resonance frequency. The vibration arm 21 includes: vibration arm parts 23 and 24 separated from each other by a through hole 22 bored therethrough at its width direction middle part, vertically to its thickness direction, and in its longitudinal direction; an additional mass part 25 together connecting end parts of the arm parts 23 and 24 separated from each other; and excitation electrodes 31 to 34 provided as excitation means on the arm parts 23 and 24. The vibration arm 21 is supported by a pseudo both-end fixation structure or a single-end fixation structure, having the base part 20 and the mass part 25, and used for detecting a change in the resonance frequency of the vibratory body 10 owing to an inertia effect of the mass part 25 when acceleration is given thereto. COPYRIGHT: (C)2009,JPO&INPIT
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