Mechanism for varying the end of stroke position of a cylinder and substrate processing apparatus including same

摘要

A cylinder stop position varying mechanism (122) is employed in a cylinder (106) having a piston (107) and a shaft (108). The cylinder stop position varying mechanism includes a stopper (109) fitted onto the shaft; a pair of limiters (110a,110b) for stopping a reciprocating movement of the piston by contact with the stopper; and a limiter moving mechanism (111,112) for varying positions of the limiters. The cylinder is driven by a hydraulic pressure, and the limiter moving mechanism (111,112) is provided to each of the pair of limiters (110a,110b) to control positions of the limiters independently.