| 摘要 |
<p>A method for replacing a lens (S) having refractive power in a first projection optical system (U1) includes the steps of measuring a wavefront of measuring light passing through the first projection optical system (U1) in a state in which the lens (S) having refractive power or a master lens (M) is mounted in the first projection optical system (U1), measuring a wavefront of measuring light passing through a second projection optical system (Ux) in a state in which the master lens (M) or an alternative lens (C) is mounted in the second projection optical system (Ux), processing the alternative lens (C) in accordance with measurement results, and replacing the lens (S) having refractive power in the first projection optical system (U1) with the processed alternative lens (C).</p> |
