DOME-CHAMBER'S POSITION GUIDE EQUIPMENT OF SINGLE CRYSTAL GROWER

摘要

A dome chamber coupling position guide device of a single crystal growing device is provided to prevent a flange of the chamber from being damaged by arranging the separated dome chamber in an exact position when coupling the dome chamber in a main chamber. A coupling position deciding pin(22) is equipped in a rotation support frame(41) of a dome chamber control device. The deciding pin is operated up and down by an operating cylinder(20). A rotating unit of the dome chamber control device corresponds to the coupling position deciding pin. The coupling position pin and a guide receiving groove(31) are prepared in the rotation unit. The bottom part of the coupling position deciding pine has an incline surface(23) tapered inward. The coupling position deciding pin is received in the guide receiving groove.