发明名称 TRANSFER APPARATUS OF SOLAR WAFER SPLITTER
摘要 <p>A transfer apparatus of a solar wafer splitter is provided to prevent the drying of a wafer by spraying the water on the wafer through a nozzle unit. A driving roller is mounted on an upper part and a lower part of a first separation unit(100). The driving roller is driven by a drive motor(110). The first separation unit separates a plurality of wafers to individual wafers. A transfer unit(200) is formed in one side of the first separation unit. A plurality of transferring rollers(220) are mounted on the transfer unit. A plurality of transferring rollers are driven by the drive motor. The transfer unit transfers the wafer. The nozzle unit includes a plurality of first nozzles and a plurality of second nozzles. The plurality of first nozzles are formed in the upper part of the transfer unit. The plurality of second nozzles are formed in the lower part of the transfer unit. A second separation unit(400) is formed in one side of the transfer unit. The driving roller is mounted on the upper part and the lower part of the second separation unit. The driving roller is driven by the drive motor. The second separation unit separates the plurality of wafers which are not separated by the first separation unit to the individual wafers.</p>
申请公布号 KR20090018692(A) 申请公布日期 2009.02.20
申请号 KR20090005715 申请日期 2009.01.22
申请人 KIM, MYEONG HAK 发明人 KIM, MYEONG HAK
分类号 H01L21/677;B65G49/07;H01L21/68 主分类号 H01L21/677
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