| 摘要 |
PROBLEM TO BE SOLVED: To provide a structure capable of measuring fine force and torque with high sensitivity, and greatly simplifying manufacturing processes without an electric insulating film. SOLUTION: The strain sensor includes a coil in a zigzag pattern in which linear parts and folded parts are alternately continued on a substrate, and a super-magnetostriction film formed in a periphery of the coil. The respective linear parts of the coil has a sandwich structure where a soft magnetic film and the super-magnetostriction film, or the super-magnetostriction films are directly in contact with the coil and sandwich the linear part vertically. The super-magnetostriction film and the soft magnetic film (or the super-magnetostriction film) have a rectangle pattern with a length not more than that of the linear part of the coil and a width not less than that of the linear part of the coil, and they are arranged so that the adjacent rectangle patterns are not overlapped each other on the substrate. COPYRIGHT: (C)2009,JPO&INPIT
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