| 摘要 |
PROBLEM TO BE SOLVED: To quickly and highly accurately detect the three-dimensional position of a particle under observation by a microscope. SOLUTION: In a three-dimensional position detection device 10, a deflecting optical member 13 for dividing-deflecting a parallel light flux and a mask 14 for restricting transmission through the deflecting optical member 13 of the parallel light flux before being divided-deflected are provided on a pupil surface between an objective lens 12 and the second objective lens 15. The mask 14 is provided in order that a light flux sectional shape on the pupil surface of an imaging optical system has a prescribed shape, relative to each light flux divided by the deflecting optical member 13. The mask 14 has an aperture 21 having a transmittance higher than a prescribed value. This device can be applied to an optical system for detecting the three-dimensional position of the particle under observation by the microscope. COPYRIGHT: (C)2009,JPO&INPIT
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