发明名称 METHOD AND APPARATUS FOR FABRICATING SUB-LITHOGRAPHY DATA TRACKS FOR USE IN MAGNETIC SHIFT REGISTER MEMORY DEVICES
摘要 In one embodiment, the invention is a method and apparatus for fabricating sub-lithography data tracks for use in magnetic shift register memory devices. One embodiment of a memory device includes a first stack of dielectric material formed of a first dielectric material, a second stack of dielectric material surrounding the first stack of dielectric material and formed of at least a second dielectric material, and at least one data track for storing information, positioned between the first stack of dielectric material and the second stack of dielectric material, the data track having a high aspect ratio and a substantially rectangular cross section.
申请公布号 US2009046493(A1) 申请公布日期 2009.02.19
申请号 US20070838663 申请日期 2007.08.14
申请人 ASSEFA SOLOMON;GAIDIS MICHAEL C;JOSEPH ERIC A;PARKIN STUART STEPHEN PAPWORTH;TYBERG CHRISTY S 发明人 ASSEFA SOLOMON;GAIDIS MICHAEL C.;JOSEPH ERIC A.;PARKIN STUART STEPHEN PAPWORTH;TYBERG CHRISTY S.
分类号 G11C19/08;H01L21/00 主分类号 G11C19/08
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